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12 Á¦Ç°À̹ÌÁö

LEGS Linear LL06

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ ±¸µ¿À» ÅëÇÑ Á¤¹Ð ¸ð¼Ç
- ¹é·¡½ÃÇÁ¸® ±¸µ¿¿¡ ÀÇÇÑ ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (17 x 19.6 x 7 mm)
- ½ºÅçÆ÷½º 6.5N
- 1.25um ¶Ç´Â 80nm ÇØ»óµµÀÇ ³»ÀåÇü ¿£ÄÚ´õ(¿É¼Ç)
- Full force power-off locking ¾ÈÀü ±â´É
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LEGS Linear Twin LT20

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ ±¸µ¿À» ÅëÇÑ Á¤¹Ð ¸ð¼Ç
- ¹é·¡½ÃÇÁ¸® ±¸µ¿¿¡ ÀÇÇÑ ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (22 x 21 x 17.5 mm)
- ½ºÅçÆ÷½º 20N
- Áø°ø(Vacuum) ȤÀº ºñÀÚ¼º(Non-magnatic)¿É¼Ç Àû¿ë °¡´É
- Full force power-off locking ¾ÈÀü ±â´É
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LEGS Linear LT40

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ ±¸µ¿À» ÅëÇÑ Á¤¹Ð ¸ð¼Ç
- ¹é·¡½ÃÇÁ¸® ±¸µ¿¿¡ ÀÇÇÑ ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (32.1 x 24.2 x 23.1 mm)
- ½ºÅçÆ÷½º 40N
- Áø°ø(Vacuum) ȤÀº ºñÀÚ¼º(Non-magnatic)¿É¼Ç Àû¿ë °¡´É
- Full force power-off locking ¾ÈÀü ±â´É
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LEGS Linear Twin LTC40

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ ±¸µ¿À» ÅëÇÑ Á¤¹Ð ¸ð¼Ç
- ¹é·¡½ÃÇÁ¸® ±¸µ¿¿¡ ÀÇÇÑ ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (65 x 29 x 29 mm)
- ½ºÅçÆ÷½º 40N , ½ºÆ®·ÎÅ© 12.8 mm
- Full force power-off locking ¾ÈÀü ±â´É
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LEGS Linear Twin LTC300

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ ±¸µ¿À» ÅëÇÑ Á¤¹Ð ¸ð¼Ç
- ¹é·¡½ÃÇÁ¸® ±¸µ¿¿¡ ÀÇÇÑ ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (80 x 50 x 50 mm)
- ½ºÅçÆ÷½º 300N , ½ºÆ®·ÎÅ© 20 mm
- Áø°ø(Vacuum)¿É¼Ç Àû¿ë °¡´É
- Full force power-off locking ¾ÈÀü ±â´É
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7 Á¦Ç°À̹ÌÁö

LEGS Linear Twin LTC450

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ ±¸µ¿À» ÅëÇÑ Á¤¹Ð ¸ð¼Ç
- ¹é·¡½ÃÇÁ¸® ±¸µ¿¿¡ ÀÇÇÑ ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (98 x 50 x 50 mm)
- ½ºÅçÆ÷½º 450N , ½ºÆ®·ÎÅ© 20 mm
- Áø°ø(Vacuum)¿É¼Ç Àû¿ë °¡´É
- Full force power-off locking ¾ÈÀü ±â´É
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LEGS Rotary LR17

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ °¡Àå ÀÛÀº ȸÀü½Ä ÇÇ¿¡Á¶¸ðÅÍ
- 0.2 mrad(0.01¡Æ) ºÐÇØ´ÉÀÇ 15bit ¿£ÄÚ´õ ÀÏüÇü(¿É¼Ç)
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (17 x 32.2 mm)
- ½ºÅçÅäÅ© 30mNm
- Full force power-off locking ¾ÈÀü ±â´É
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LEGS Rotary LR23-50

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ È¸Àü½Ä ÇÇ¿¡Á¶¸ðÅÍ
- 0.4 mrad(0.02¡Æ) ºÐÇØ´ÉÀÇ ¿£ÄÚ´õ ÀÏüÇü(¿É¼Ç)
- »þÇÁÆ® ¿¬Àå ¹öÀü(¿É¼Ç)
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (23 x 41.5 mm)
- ½ºÅçÅäÅ© 50mNm
- Áø°ø(Vacuum) ȤÀº ºñÀÚ¼º(Non-magnatic)¿É¼Ç Àû¿ë °¡´É
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LEGS Rotary LR23-80

- µ¶Æ¯ÇÑ Piezo LEGS¢ç ¹æ½ÄÀÇ È¸Àü½Ä ÇÇ¿¡Á¶¸ðÅÍ
- 0.4 mrad(0.02¡Æ) ºÐÇØ´ÉÀÇ ¿£ÄÚ´õ ÀÏüÇü(¿É¼Ç)
- »þÇÁÆ® ¿¬Àå ¹öÀü(¿É¼Ç)
- ÄÄÆåÆ®ÇÑ »çÀÌÁî (23 x 41.3 mm)
- ½ºÅçÅäÅ© 80mNm
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PMD301 Controller

- Piezo LEGS¢ç Àü¿ë ¸ð¼Ç Á¦¾î ÄÁÆ®·Ñ·¯ (ÃÖ´ë nm´ÜÀ§ Á¦¾î °¡´É)
- Closed loop control / Open loop mode / Servo mode
- SPI ÀÎÅÍÆäÀ̽º¸¦ ÅëÇØ ¿ÜºÎ ¸ð¼Ç ÄÁÆ®·Ñ·¯·Î ¿¬°áµÇ´Â ½½·¹ÀÌºê ¾ÚÇÁ
- RS485 , USB Åë½Å ŸÀÔ
- Àü¿ë ¼ÒÇÁÆ®¿þ¾î Á¦°ø (DriveLabs)
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PMD401 Controller

- Piezo LEGS¢ç Àü¿ë ¸ð¼Ç Á¦¾î ÄÁÆ®·Ñ·¯ (ÃÖ´ë nm´ÜÀ§ Á¦¾î °¡´É)
- Closed loop control / Open loop mode / Servo mode
- ´ÙÁß Ãà(multi-axis) »ç¿ëÀ» À§ÇÑ ÀûÃþÇü º¸µå
- SPI ÀÎÅÍÆäÀ̽º¸¦ ÅëÇØ ¿ÜºÎ ¸ð¼Ç ÄÁÆ®·Ñ·¯·Î ¿¬°áµÇ´Â ½½·¹ÀÌºê ¾ÚÇÁ
- RS485 Åë½Å ŸÀÔ
- Àü¿ë ¼ÒÇÁÆ®¿þ¾î Á¦°ø (DriveLabs)
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1 Á¦Ç°À̹ÌÁö

DMC-30019 Motion Controller

- Galil Motion control DMC-30000 series ±â¹Ý Piezo LEGS¢ç Àü¿ë ³ª³ë¹ÌÅÍ(nm) ¸ð¼ÇÁ¦¾î ÄÁÆ®·Ñ·¯
- Closed loop control / Gearing mode / Electronic CAM mode
- Ethernet , 5-Wire RS232 Åë½Å ¿¬°á
- Real-time display Áö¿ø
- Àü¿ë ¼ÒÇÁÆ®¿þ¾î Á¦°ø (PiezoTools)
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